Hello All,

Currently I'm writing a paper and a part involves that I do some calculation on
exposure time and dosage rate for a given intensity. I'm away from my university
and am having trouble finding resources to help me in this calculation.

Please let me know if there are any papers or manuals out there that would help
me calculate the exposure time or dosage rate for a photolithographic process.
I'd appreciate all the help this group can provide in helping me complete my
paper.

Thanks,
Vinodh