Hughes in Carlsbad were running Indium metal lift off for a number of years as a production process. 13 micron thick positive resist, define metal bumps around the edge of the die. Use image reversal for reverse slope for lift off. Then 7 microns of Indium to create a flip chip with 7 micron Indium bumps. Carry Scott nee Weatherwax is still in the Carlsbad area and is a mine of information on the process. Bill Moffat, CEO Yield Engineering Systems, Inc. 203-A Lawrence Drive, Livermore, CA 94551-5152 (925) 373-8353 bmoffat@yieldengineering.com www.yieldengineering.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of jpt sharma Sent: Tuesday, October 23, 2007 11:06 AM To: mems-talk@memsnet.org Subject: [mems-talk] Indium Deposition Hi All I am thinking of depositing indium for metal lift off. I am wondering anyone has done this before? Can we deposit Indium by thermal? Thanks J. Sharma