durusmail: mems-talk: Best resist for HF etching
Best resist for HF etching
2007-11-16
2007-11-16
2007-11-17
2007-11-16
2007-11-16
2007-11-16
2007-11-16
2007-11-17
2007-11-16
2007-11-17
Best resist for HF etching
Mikael Evander
2007-11-16
Hi!

We usually have an etch-rate of 1.3 µm/min in borofloat. I'm not sure what you
mean with the primer though. We buy borofloat chrome blanks, expose them,
hardbake and etch.

/Mikael

----- Original Message -----
From: Andrea Mazzolari 
Date: Friday, November 16, 2007 3:28 am
Subject: Re: [mems-talk] Best resist for HF etching

> Hello Mikael,
> which is borofloat etch rate ? Which primer do you use ?
>
> Best regards,
> Andrea.


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