There was some nice work with 3-D inductors done at PARC (formerly Xerox PARC) recently. See Van Schuylenbergh et al., Tech. Dig. Int. Solid-State Circuits Conf., Feb 2003, pp. 392-3. It's also described in "An Introduction to Microelectromechancial Systems Engineering, 2nd Ed.," 2004, by Maluf and Williams, pp. 198-200. --Kirt Williams ----- Original Message ----- From: "Jose Guevarra"To: "General MEMS discussion" Sent: Thursday, January 17, 2008 10:38 AM Subject: [mems-talk] Micro Conducting Coils > Hi, > > Can any of you point me to work that is being done on micro conducting > coils? Something like a micro inductor.