Miss Ghazal, No it oxidizes rapidly and turns black. It may be possible to alternately oxidise with an Oxygen plasma then eat the oxide with a Hydrogen containing gas or ammonia. Bill Moffat, CEO Yield Engineering Systems, Inc. 203-A Lawrence Drive, Livermore, CA 94551-5152 (925) 373-8353 www.yieldengineering.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Hakemi, Ghazal Sent: Thursday, January 24, 2008 1:40 AM To: mems-talk@memsnet.org Subject: [mems-talk] Copper Dear all, I have a chemistry-related question : does copper etch away in oxygen plasma?