Only oxidizes in oxygen plasma - no etch. Copper does not lend itself to plasma etch with Cl or F gases either due to the low volatility of copper chloride or copper bromide products. There was an interesting dry/wet combined etch developed at Texas A&M in which copper halide product is formed via halide gas plasma treatment and then the non-volatile product is dissolved in a wet bath Y. Kuo, S. Lee / Vacuum 74 (2004) 473–477 Bill Flounders Berkeley Microlab Hakemi, Ghazal wrote: > Dear all, > > I have a chemistry-related question : does copper etch away in oxygen plasma? >