Hello everybody,
I made a layer of TiSi2 on the top of  my SiN cantilever
For the etching of my cantilever I used KOH but the TiSi2 does not survive. It
is like
a sheet that starts to remove from the SiN base

Does enyone experience with the TiSi2?
Which wet etchant should I use?

ir. Elina Iervolino - PhD student
Delft University of Technology
Office:
Xensor Integration
Distributieweg 28
P.O. Box 3233
2645 EJ Delftgauw
Netherlands

Office Phone: +31 (0)15-2578040
Mobile Phone:  06 49 209 692
E-mail: E.Iervolino@tudelft.nl
        eli@xensor.nl