Hi Elina, Typically halogen-based plasma etching is used for etching TiSi2. However, HF based etchants are known to have a detrimental effect on TiSi2. So you could try to use BHF, for instance. If this doesn't work, you may also try to use Piranha solution (50:1 ratio of H2SO4:H2O2) @ 120 C. Do let me if it worked (and if there are any better tricks). Hope this helps! Vijay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Elina Iervolino - EWI Sent: Thursday, January 31, 2008 5:26 PM To: mems-talk@memsnet.org Subject: [mems-talk] TiSi2 etching Hello everybody, I made a layer of TiSi2 on the top of my SiN cantilever For the etching of my cantilever I used KOH but the TiSi2 does not survive. It is like a sheet that starts to remove from the SiN base Does enyone experience with the TiSi2? Which wet etchant should I use?