Dear Steven, Personally I have sputtered Pd (which is chemically similar to Pt) directly on virgin prima Si (with native oxide). The deposited coat (which was ~20nm in my case) was stable against common organic and inorganic solvents (ethanol, acetone, water, toluene). I do not know if it will be stable in piranha, but it is possible (Pt is normally dissolved in aqua regia). When my Pd layer was exposed to air plasma (i.e. a mild oxygen plasma), the Pd was initially stable (also in solvents), but would start to flake when exposed to a reducing agent. I hope this information helps. Kind regards, Dirk Renckens PhD student - TU Delft -----Original Message----- From: Steven Yang [mailto:steven030505@gmail.com] Sent: 16 February 2008 10:47 To: mems-talk Subject: [mems-talk] Is it possible to deposit Pt directly on Si/SiO2(PECVD) substrate? Hi, all Not sure the Pt (sputtering) will stick firmly on the substrate or not? as normally Ti/Pt is used for the electrode deposit. But I am going to try Pt directly on Si substrate with PECVD SiO2 (1 or 2 um) due to machine limitation. and if possible, will the Pt electrode firm enought to go through some processes like Piranha, O2 plasma? Thank you very much! Steven