Hi Darren, Negative photoresists are alkali-resitant to a certain extent. But you`ll need higher curing temperatures than 80°C, especially if you want to minimize outgasing. Regards, Natsuki -----Ursprüngliche Nachricht----- Von: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] Im Auftrag von Slade, Darren (SELEX GALILEO, UK) Gesendet: Freitag, 14. März 2008 09:14 An: mems-talk@memsnet.org Betreff: [mems-talk] NaOH Resistant Sealant Hi All, I am looking for a something in the way of a sealant to protect Al bond pads on a silicon wafer from being attacked in NaOH/H2O2 etch. The sealant should be low/non-outgassing, low (<80degC) cure temp, low viscosity and easily and completely removable with domestic chemicals (acetone, tetrachloroethylene etc). I'll be grateful for any recommendations, even if they don't meet all the specs above. I am currently using Dow Corning DC282, but it is not wholly resistant to the NaOH.