durusmail: mems-talk: Cu etch in FeCl3
Cu etch in FeCl3
2008-03-17
Cu etch in FeCl3
Hakemi, Ghazal
2008-03-17
Dear All,

does copper etch anisotropically in FeCl3?
I am trying to achieve relatively straight walls.
Many thanks,

Miss Ghazal Hakemi
PhD Student=20
Microsystems and Nanotechnology Centre (Building 70)
Cranfield University
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