Hi, I dissolve my FeCl3 powder into DI water and used the solution = repeatedly to etch copper with minimum undercut. Adding some HCl to the = solution helps to reduce some kind of colloid formation. FYI. Best regards, Tien Khee ________________________________ From: Hakemi, Ghazal [mailto:g.hakemi@Cranfield.ac.uk] Sent: Mon 3/17/2008 10:21 PM To: mems-talk@memsnet.org Subject: [mems-talk] Cu etch in FeCl3 Dear All, does copper etch anisotropically in FeCl3? I am trying to achieve relatively straight walls. Many thanks, Miss Ghazal Hakemi PhD Student=3D20 Microsystems and Nanotechnology Centre (Building 70) Cranfield University