I think it is better to observe the movement by Wyko/Zyko, which apply the interference principle and is sensitive to see the tiny movement. BR my2232@columbia.edu wrote: Hello all, I am trying to actuate a comb-actuator. However, I was not able to see any movement under Karl Suss probe station. The resistivity of my SOI wafer is 1-30 Ohmcm. Dopant tytpe is P/Boron. The wafer is from ULTRASIL. I am applying a static voltage differenece, i am not interested about dynamic voltages for now. Is it a problem to use 1-30 Ohmcm resistivity Silicon. Thanks in advance, Mehmet Yilmaz PhD student Mechanical engineer