*TiO2 thin film mechanical properties, deposition, dry etching.* Hello everyone, Titanium dioxide (TiO2) thin film mechanical properties : I need to deposit a thin amorphous film of Titanium dioxide TiO2 about 100 - 200 nm thick. If anyone has any information on the mechanical properties of thin film TiO2 such as tensile strength, Young's modulus, Bulk modulus, Fatigue, Poisson's ratio, force -displacement results or pressure -displacement results please help. Titanium Dioxide (TiO2) deposition : What is the best way to deposit a thin film of TiO2 so as to have a very low surface energy? Titanium Dioxide (TiO2) Etching: What is the best dry etch chemistry for TIO2? Can TiO2 be etched in Ar/Sf6 plasma at 80-90 mtorr? Thank you. Bhargav P Nabar. UTA