Hi, Sharma, thanks a lot for your reply. I am also using Cambridge nanotech ALD. Do you mean you pump for 120 sec after the pulse? Is your exposure time 0s? And are theses parameters for both H2O and precursor? Thanks. Maggie Maggie Qianxi Lai PH.D Candidate Department of Mechanical & Aerospace Engineering University of California, Los Angeles http://www.chen.seas.ucla.edu/ _____ From: jpt sharma [mailto:jptsharma@yahoo.com] Sent: Friday, April 04, 2008 5:14 PM To: General MEMS discussion; qlai@ucla.edu Subject: Re: [mems-talk] Low-temperature ALD for Al2O3 or HfO2 HI maggie I did some ALD for Al2O3at 40C in cambridge nanotech ALD. and I use pulse time 0,015 sec and wait time 120 sec. The film looks good and growth rate is 0.78 A/cycle. Hope this helps.