Hi Robert, I recently set-up at electrochemical drilling station in our facilities for Pyrex glass. Not sure of your hole requirements (roughness, wall profile, ...), but it seemed to work well if you are interested in just an access thru the wafer. 10um might be a bit much, but 30-150um might be possible. Thanks, Carlos Gonzalez, Ph.D. Abbott Laboratories Depart. 46s, Build. AP52 South 200 Abbott Park Road Abbott Park, IL 60064-3537 (847) 935-5423 (847)937-5500 Fax carlos.gonzalez@abbott.com ROkojie@aol.com on 08/17/98 11:10:07 AM Please respond to mems-cc@ISI.EDU @ INTERNET To: MEMS@ISI.EDU @ INTERNET cc: Subject: Holes in Pyrex Hi folks. I looking to drill an array of 10um