durusmail: mems-talk: Re: Holes in Pyrex
Re: Holes in Pyrex
1998-08-17
1998-08-17
Re: Holes in Pyrex
Gonzalez,Carlos
1998-08-17
Hi Robert,

I recently set-up at electrochemical drilling station in our facilities for
Pyrex glass.  Not sure of your hole requirements (roughness, wall profile,
...), but it seemed to work well if you are interested in just an access thru
the wafer.  10um might be a bit much, but 30-150um might be possible.

Thanks,

Carlos Gonzalez, Ph.D.
Abbott Laboratories
Depart. 46s, Build. AP52 South
200 Abbott Park Road
Abbott Park, IL 60064-3537
(847) 935-5423
(847)937-5500 Fax
carlos.gonzalez@abbott.com





ROkojie@aol.com on 08/17/98 11:10:07 AM
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Subject: Holes in Pyrex

Hi folks.

I looking to drill an array of 10um
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