durusmail: mems-talk: How to pattern photoresist in channel bottom?
How to pattern photoresist in channel bottom?
2008-04-07
2008-04-07
2008-04-08
2008-04-09
How to pattern photoresist in channel bottom?
P.E.M. Kuijpers
2008-04-08
Hello Steve,

We overcome this problem by  shadow exposure under an angle of the UV light

Regards,
Peter Kuijpers
MiPlaza
DTS/TFF
High Tech Campus 04
Room: WAGp5-11
5656 AE Eindhoven
The Netherlands
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