durusmail: mems-talk: How to pattern photoresist in channel bottom?
How to pattern photoresist in channel bottom?
2008-04-07
2008-04-07
2008-04-08
2008-04-09
How to pattern photoresist in channel bottom?
Aarti Arora
2008-04-09
Hi Mr. Steven,

To fill the channel You can try with negative photoresist SU-8 2002, 2005, 2010
. It will give you proper filling of channels and uniform spreading of resist
over all the surface.

Aarti Arora,
Lecturer,
ECE Department,
Kurukshetra Institute of Technology and Management,
Bhor Saidan,
Pehowa Road,
Kurukshetra
E-Mail: aarti25nov@yahoo.com
Mbl:    91-9996485675
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