durusmail: mems-talk: P-type polysilicon
P-type polysilicon
2008-04-17
2008-04-17
P-type polysilicon
Roger Shile
2008-04-17
Does boron also have an output energy?

-----Original Message-----


Dear MEMS researchers,

I am currently working on a polysilicon thermocouple(3000A thickness),
and would like to ask some questions regarding the fabrication process.

I would like to know about the input energy of boron and resistivity of
polysilicon when doped with different dosage and temperature conditions.

Also I wonder about the relationship between annealing temperature and
time.

If you have any procedures in fabricating thermocouple using
polysilicon, I would be grateful if you can share them with me.

Sincerely yours
BongSeop Kwak
Yonsei University
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