durusmail: mems-talk: Teflon Patterning
Teflon Patterning
2008-04-21
2008-04-21
Solvent effects on Teflon AF
2008-05-09
2008-05-12
2008-04-21
2008-04-21
Teflon Patterning
Teimour Maleki
2008-04-21
Dear all,
 I am trying to pattern a thin film of Teflon on silicon substrate. I tried
argon plasma activation, it seems fine, but I have problem with adhesion of
Teflon to silicon. When I do post processing, it will pill of. Any comments
on this will be appreciated very much.
Thanks,
-Teimour

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