Hi Teimour, Do what they do to get PTFE to stick to the surface of frying pans - mechanical interlocking. Roughen-up your Si surface using RIE (you could try an isotropic recipe, through a mask) prior to PTFE deposition and this should help. Regards, Michael > > ---------- Forwarded message ---------- > From: "Teimour Maleki"> To: "'General MEMS discussion'" Date: Sun, 20 Apr 2008 23:34:46 -0400 > Subject: [mems-talk] Teflon Paterning > Dear all, > I am trying to pattern a thin film of Teflon on silicon substrate. I tried > argon plasma activation, it seems fine, but I have problem with adhesion of > Teflon to silicon. When I do post processing, it will pill of. Any comments > on this will be appreciated very much. > Thanks, > -Teimour