Moshe Can you use an adhesion layer? Ti or Cr without breaking the vacuum between the two layers? If not, it's tough. You will have to either evaporate with very high substrate temperature or roughen the surface. Shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Moshe Sent: Thursday, May 01, 2008 7:14 AM To: mems-talk@memsnet.org Subject: [mems-talk] Gold evaporation coating on silicon. Hello I want to coat silicon with evaporation coating, and to assurance that the adhesion between the two materials will be optimal. What will be the optimal treatment to achieve adhesion ?