Moshe, In addition to Cr (as mentioned in other emails), Ta and Ti also work as adhesion layers for Au on Si. Kevin Paul Nichols MESA+ Institute for Nanotechnology Mesoscale Chemical Systems Meander 151 University of Twente Postbus 217 7500 AE Enschede The Netherlands Office: +31 (0)53 489 26 31 Mobile: +31 (0)6 49 312 471 Fax : +31 (0)53 489 35 95 Email : k.p.nichols@utwente.nl Web : http://mcs.tnw.utwente.nl/ > From: Moshe> Reply-To: General MEMS discussion > Date: Wed, 30 Apr 2008 22:14:14 -0700 (PDT) > To: > Subject: [mems-talk] Gold evaporation coating on silicon. > > Hello > > I want to coat silicon with evaporation coating, and > to assurance that the adhesion between the two > materials will be optimal. > What will be the optimal treatment to achieve > adhesion ?