I think this book will help you.
"Fundamentals of Microfabrication" by M. Madou
Anna

Jose Guevarra wrote:
> Hi,
>
>  I'm an undergrad whose getting serious about microfab.  I have two
> books (one is science and engineering of microelectronic fab by
> cambell)
> but I don't think either is geared toward entry level/ undergrad level
> students.  Can anyone recommend a good book with lot's of worked out
> examples and clear
> explanations of material concepts?
>