Have you tried a UV cure adhesive? You might be able to apply this to the top surface of the SU-8 structure and then use a bonder plus UV energy to form the bond to the cap glass. Best Regards, Garrett Oakes EV Group invent * innovate * implement Application Engineer - Direct: +1 (480) 305 2443, Main: +1 (480) 305 2400 Fax: +1 (480) 305 2401 Cell: +1 (480) 516 6724 E-Mail: G.Oakes@EVGroup.com, Web: www.EVGroup.com -----Original Message----- From: seyeda@ualberta.ca [mailto:seyeda@ualberta.ca] Sent: Friday, May 09, 2008 1:10 PM To: General MEMS discussion Subject: [mems-talk] Material for capping a SU8-2050 Microfluidic Opto-BioChip Hi all, I have made a microfluidic Opto-Biochip in SU8 2050 on a glass substrate. Now I need to cap this with another optically clear material such as glass, PDMS, PMMA or any other material that may do the job. Up to now we haven't had success in bonding any of these materials to SU8 after post exposure bake. Does anybody know a material and the process that may work as a cap for SU8 chip.