durusmail: mems-talk: Damaging of boats during nickel evaporation
Damaging of boats during nickel evaporation
2008-05-24
2008-05-25
2008-05-30
2008-06-01
Damaging of boats during nickel evaporation
X.P. Zhu
2008-05-30
Hi,

   I met similar problem when I evaporated Al by
tungsten boat. When Al melted in tungsten boat, the
evaporation rate suddenly reduced and after a while
the boat was "ate" by the melted Al. So I can not
obtain thick Al film. Does anyone know this and give
some hint? Thank you very much.

Zhu X. P.


--- Tolga YELBOGA 写道:

> Hi;
> You should use tungsten or molybdenium boat for
> nickel or gold. Most
> suitable materials are these because of their
> thermal properties. Alimuna is
> very strong material. But if suddenly temperature to
> be different (hot or
> cold), alimuna will be damaged.
>
> Solutions;
> * You can use different type boat that i said that
> * You can evaporate very very slowly (But it can be
> caused of different
> problems.)
>
>
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