Thanks Tolga, I heard AZ 9260 is more transparent than AZ 4620 which may help with the fully UV exposure, but never used it before. Would u suggest on the processing recipe including spin-speed, soft baking temp/time, exposure dose, developing time and hard bake tempe/time for >30um film, appreciate your help Michael ________________________________ From: mems-talk-bounces@memsnet.org on behalf of Tolga YELBOGA Sent: Wed 6/4/2008 1:17 PM To: 'General MEMS discussion' Subject: Re: [mems-talk] 20um features using AZP4620 Hi; Should you use only AZ4620 ? I used AZ9260 positive resist before and 33 um thickness was obtained by multiple coating. And profile of the resist rather perpendicular. I think you can use AZ9260..