durusmail: mems-talk: Re: Spinner for SOG
Re: Spinner for SOG
Re: Spinner for SOG
Ash Parameswaran
1998-08-19
The SOG manufactureer usually give the
thickness versus spin speed data.


Any lithographic spinner should do the job.

We have done 3 to 4 microns thick, however using
multiple coats.

Ash Parameswaran


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