Hi Peter: We use SiN-SiN bonding for III-V integration. A couple of our references are listed below (with references in those papers to earlier work). Hayashi S, Sandhu R, Wojtowicz M, Chen G, Hicks R, Goorsky MS. InGaAs quantum wells on wafer-bonded InP/GaAs substrates. Journal of Applied Physics, vol.98, no.9, 1 Nov. 2005, pp. 93526-1-4. Hayashi S, Sandhu R, Wojtowicz M, Sun Y, Hicks R, Goorsky MS. Determination of wafer bonding mechanisms for plasma activated SiN films with x-ray reflectivity. [Journal Paper] Journal of Physics D (Applied Physics), vol.38, no.10A, 21 May 2005, pp. A174-8. P.E.M. Kuijpers wrote: > Hi all, > > Does someone knows articles/recipes for SiN-SiN or SiN-Si waferbonding? > > Thanks in advance. > > Peter Kuijpers > MiPlaza > mailto:p.e.m.kuijpers@philips.com -- Mark Goorsky Professor and Chair Materials Science and Engineering University of California, Los Angeles http://www.seas.ucla.edu/ms/faculty1/goorsky.html