Peter, here are some papers on anodic bonding to silicon nitride, Microfabrication of cantilever styli for the atomic force microscope T.R. Albrecht et. al. J.Vac. Sci. Technol. A, Vol 8, No. 4, Jul/Aug 1990 Detailed characterization of anodic bonding process between glass and thin-film coated silicon substrates T.M.H. Lee et al. Sensors and Actuators 86(2000)103-107 Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bonding J.A. Plaza , J. Esteve, E. Lora-Tamayo Sensors and Actuators A 67 (1998) 181-184 Fusion bonding of silicon nitride, Low temperature Si3N4 direct bonding Robert W. Bower and Mohd S. Ismail Appl. Phys. Lett., Vol. 62, No. 26, 28 June 1993 p. 3485-3487 Roger Shile -----Original Message----- Hi all, Does someone knows articles/recipes for SiN-SiN or SiN-Si waferbonding? Thanks in advance. Peter Kuijpers MiPlaza mailto:p.e.m.kuijpers@philips.com