Hello Everyone I have this thin ZnO thin film foil and I want to cut it to get mm scale, for example 7 mm x 7 mm without damaging its surface smoothness. So the two important factors are: 1. Surface should stay smooth. No damage to the surface. 2. Also I don't want to deform the surface when I cut it. I really appreciate if you give me some suggestions. Thank you very much. Let's support MEMS-TALK.