The frequency of the plasma generator is not important.  The major importance is
the power delivered to the surface you wish to treat.  Natural plasma include
Lightning, D.C. but high voltage because it is at atmospheric pressure.  Aurora
Borealis, the Earths magnetic field at high atmosphere, low pressure, acting on
ionized particles from sun spots.  1 revolution per day.  Fluorescent light 50
to 60 cycles per second.  Low frequency RF up to 100 KH/Z usually capacitive
systems.  High frequency RF usually 13.54 MH/Z typically inductive systems.
Microwave 2.54 GK/Z older single wafer plasma strippers.  If the glass is flat
and the flat surface is the surface you want to bond to a capacitive system
would be the most efficient.  Call me or email me direct and I will give you
lots of details of plasma bonding.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

www.yieldengineering.com

-----Original Message-----
From: mems-talk-bounces@memsnet.org
Sent: Wednesday, September 17, 2008 12:07 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Oxygen plasma

Hi all!

I'm trying to purchase a new oxygen plasma system for our lab.
The main purpose is to bond PDMS with glass/PDMS, but I'm having trouble in
which type to choose.
I've searched for a few of those out in the internet, but there are some
treatment systems that uses RF power while others use microwave.

There's a big difference between these two types, but I really don't know what
the differences are when coming to bond PDMS.
Can any of you give me a hint on this issue?

Also, the lab I used to be in used an oxygen asher which uses RF, but those seem
to be a little too expensive.
I'd appreciate if you could give me an advice on which type of products are cost
efficient.

I'm planning to use this plasma system only for PDMS bonding only (possibly
photoresist removal experiments as well though...).