Joe, Thanks for the reminder. I endorse it totally. Bill Moffat, CEO Yield Engineering Systems, Inc. 203-A Lawrence Drive, Livermore, CA 94551-5152 (925) 373-8353 www.yieldengineering.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of jgrogan@seas.upenn.edu Sent: Wednesday, September 17, 2008 6:54 PM To: General MEMS discussion; Bill Moffat Subject: Re: [mems-talk] Oxygen plasma As an aside, make sure that the pump you get is compatible with oxygen processes, which means it uses synthetic oil (or a dry pump). I had a bad experience with a vendor who insisted on selling me a system with a pump that had regular hydrocarbon oil, despite the advice of several pump companies that I consulted who all told me the same thing: it will blow up! -Joe Grogan Quoting Bill Moffat: > The frequency of the plasma generator is not important. The major > importance is the power delivered to the surface you wish to treat. > Natural plasma include Lightning, D.C. but high voltage because it > is at atmospheric pressure. Aurora Borealis, the Earths magnetic > field at high atmosphere, low pressure, acting on ionized particles > from sun spots. 1 revolution per day. Fluorescent light 50 to 60 > cycles per second. Low frequency RF up to 100 KH/Z usually > capacitive systems. High frequency RF usually 13.54 MH/Z typically > inductive systems. Microwave 2.54 GK/Z older single wafer plasma > strippers. If the glass is flat and the flat surface is the surface > you want to bond to a capacitive system would be the most > efficient. Call me or email me direct and I will give you lots of > details of plasma bonding.