Julie, -it seems to me, you have adhesion/out gassing or spikes problems. Some SEMs would help to localize. -Are u using 100% Al? AlSi or AlSiCu were better choice. good luck Ngo At 19:31 29.09.2008, you wrote: >Hi everyone, > >Heres my second attempt to send you this e-mail. First attempt included SEM >pictures; which was not allowed. Some of you may have received a blank >e-mail, Im sorry for that. If you are interested by the SEM pictures I can >send them to you directly. > >We currently have some problems with the deposition of aluminium layers. >Maybe some of you already experienced that phenomenon: > >Some bump-like structures appear all over the sample after the annealing of >the evaporated Al layer. These structures seem to be empty inside >(cavern-like). > >The test samples are bare silicon cleaned with solvents (opticlear, acetone >and IPA, 5min each in ultra-sound). They are then immersed in a solution of >8% HF: DI to etch the native oxide (10-15sec until hydrophobicity) just >before evaporation. The aluminium is then evaporated (e-beam) at a rate of >0.3nm/sec (250nm). > >The samples surface seems very clean before the evaporation. After >evaporation, the Al surface show little triangular protuberances (~100nm). > >The 450°C annealing, during 30min, reveals the cavern-like structures >(~500nm-1µm). The annealing was performed under N2 atmosphere and forming >gas (N2 80%, H2 20%); both lead to the same results. > >We dont know if this comes from >- a cleaning problem (traces of water or solvent at the surface before >evaporation), >- some problem during evaporation (contamination, non uniform deposition, >stresses) amplified during annealing, >- some contamination in the oven. >- > >Does anyone have any advices or suggestions? > >Thank you, > >Julie Dr. Ha-Duong Ngo Microsensor and Actuator Technology Research Center of Microperipheric Technologies Technical University TiB3.1 Gustave-Meyer-Allee 25, Geb. 17a 13355 Berlin Tel:+49 30 314 72 522 Fax:+49 30 314 72 603 Email:ngo@mat.ee.tu-berlin.de http://www-mat.ee.tu-berlin.de