Actually, on page 24 of SEMI M1-1106, the bow is listed as maximum 60um and not 0.06um. I'd be interested in getting wafers with a bow as low as ..06um. Jeff Besterman Addison Engineering 150 Nortech Parkway San Jose, CA 95134 office phone 408-956-5101 office fax 408-956-5111 www.addisonengineering.com -----Original Message----- From: Laura Malatto [mailto:laura@inti.gov.ar] Sent: Thursday, October 02, 2008 4:47 AM To: General MEMS discussion Subject: Re: [mems-talk] wafer bow spec It´s about 0.06 um Laura John-Rolf Oakley escribió: > Hello, > > I am having trouble keeping vacuum on some wafers and I was wondering if anyone could tell me what the SEMI standard for wafer bow is on 6", 675um, single flat, single side polished, <100>, P type Si? > > Thanks