The Semi-Std for 150 mm wafers is 60um max for Bow and Warp. Semi-M1.8 -----Original Message----- >From: John-Rolf Oakley>Sent: Oct 1, 2008 5:32 PM >To: mems-talk@memsnet.org >Subject: [mems-talk] wafer bow spec > >Hello, > >I am having trouble keeping vacuum on some wafers and I was wondering if anyone could tell me what the SEMI standard for wafer bow is on 6", 675um, single flat, single side polished, <100>, P type Si? > >Thanks Kmbh Technologies kmbh-silicon@earthlink.net 47 Rocket Circle Rancho Cordova, CA USA 95742 Phone +1 510-714-5055 FAX+1 510-217 4421 Standard and Specialty CZ and FZ Silicon, Glass and other wafers.