durusmail: mems-talk: HF vapor etching
HF vapor etching
2008-10-07
2008-10-08
2008-10-08
HF vapor etching
Barbara Cortese
2008-10-07
Hi all

I'm interested in HF vapour etching. Could someone suggest a good recipe or some
references?
I'm also looking for HF/methanol mixture vapour etching.

Thanks
Barbara

reply