Hi Barbara,

You may take a look at 2 papers from one of my past colleagues. I
recall he used an incandescent light bulb to heat the HF solution
contained in a Teflon beaker. The chips to be etched were placed on a
Teflon basket on top of the Teflon beaker.

Phuc Hong Pham et al 2007 J. Micromech. Microeng. 17 2125-2131   doi:
10.1088/0960-1317/17/10/026

Phuc Hong Pham et al 2006 J. Micromech. Microeng. 16 2532-2538   doi:
10.1088/0960-1317/16/12/003

Hope this helps.

Greetings
Nam Le
Ritsumeikan University

On Wed, Oct 8, 2008 at 2:21 AM, Barbara Cortese  wrote:
> Hi all
>
> I'm interested in HF vapour etching. Could someone suggest a good recipe or
some references?
> I'm also looking for HF/methanol mixture vapour etching.
>
> Thanks
> Barbara