The easiest way to treat Silicon to render it hydrophobic is vapor deposition of silanes. The quality (cleanliness) of the substrate material is critical for achieving a good coverage. You may contact me for further details. Boris Kobrin, Ph.D. Chief Scientist Office: 408 907-2885 x2805 Mobile: 408 806-6859 boris_kobrin@appliedmst.com Message: 1 Date: Tue, 7 Oct 2008 07:53:33 +0900 From: ???Subject: [mems-talk] Questions regarding silane coating and surface cleaning To: Message-ID: Content-Type: text/plain; charset="ks_c_5601-1987" Hi! I'm trying to treat Silicon wafers or PDMS with Silane to make it hydrophobic. As far as I recall, all I need is a dessicator. But someone told me that I need a plasma asher for it. Is this true? How exactly do I coat Silane on surfaces? Also, I'm trying to purchase a cost effective plasma system for Silicon, glass and PDMS surface cleaning. My second question is: is a microwave type oxygen plasma system good enough for surface cleaning? Thank you!