I tried this. You should do some silane chemistry on the SiO2 surface to promote parylene adhesion (see e.g. http://engineering.tufts.edu/microfab/index_files/docs/Parylene.pdf). Even then, it doesn't work too well, the parylene tended to delaminate during long etch cycles. -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Konstantin Glukh Sent: Tuesday, October 07, 2008 4:30 PM To: General MEMS discussion Subject: [mems-talk] Parylene mask for KOH etch Can anyone comment on using Parylene as a mask for KOH etch, either by itself or in addition to SiO2 hardmask? Is there any way to ensure good adhesion to Si and SiO2 and minimize undercut rate?