Hi Ruilin, I had that porblem once and it was due to insufficient soft-bake temperature. Check if you have maybe some problem with your hotplate? If that is correct, maybe you are under-exposing. Good luck! Sonia Garcia Blanco, PhD Researcher MOMS INO 2740 rue Einstein Quebec, G1P4S4, CANADA -----Message d'origine----- De : 郑瑞麟(Ruilin Zheng) [mailto:zhengruilin@gmail.com] Envoyé : Tuesday, October 21, 2008 7:23 AM À : mems-talk@memsnet.org Objet : [mems-talk] SU-8 layer stick to mask after exposure Hello, everyone, I met a problem in SU-8 process recently, the SU-8 layer stick to the mask after exposure. I rarely have this problem before. Two weeks ago, I applied an Omega UV filter for the exposure step to filter out short wavelength UV light. And this problem appear every time during exposure. At first I think it may be caused by insufficient soft-bake dose, but after I tried to prolong the baking time and use higher temperature, SU-8 layer still sticked to the mask. Does anyone have some ideas about this problem? Please help me out. By the way, the photoresist is SU-8 2150 by microchem, will be expired at Dec,2008.