Hello dear MEMS-Talk members! We are trying to electroplate 20-um thick copper over patterned 4-inch wafers. The problem is the uniformity of the Cu layer. If it is approx. 20 um in the middle of the wafer then we have something like 25 um at the edges. I found out that there is a device called an IBM Paddle Cell. Does anybody know anything about it? Is it of help in this case? Is there any other practical solution. We tried the rotating cathode method and we tried to agitate the solution with the rotating paddle. Did not help. Thank you! -- M.Sc. Denis Petrov Ph.D. Student Institute for Microsensors, -actuators and –systems (IMSAS) University of Bremen, Dept. 1: Physics / Electrical Engineering Otto-Hahn-Allee, Build. NW 1, Room N 2160 D-28359 Bremen, Germany Phone: +49 (0)421 218 - 3244 Fax: +49 (0)421 218 - 4774 E-Mail: dpetrov@imsas.uni-bremen.de http://www.imsas.uni-bremen.de IMSAS is member of the Microsystems Center Bremen (MCB) http://www.mcb.uni-bremen.de