Dear Michael (or Haixin?), I don't know of the particular resist that you're using, but in our lab that we have the hotplate about 10-15 degrees hotter when using 1 mm quartz substrates compared to 300 micron silicon substrates, in order to get the same temperature on the top surface of the substrate (we measured this directly). Also, we have a steel chuck on our mask aligner, and when using transparent substrates like quartz we put red tape on the chuck to stop reflections, or else the resist gets exposed from the light reflected from the chuck which can affect the exposure dose and can cause undesirable undercut profiles. Hope that helps, it's not exactly a recipe but it might shed some light on your problems. Jason Milne Microelectronics Research Group The University of Western Australia -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Haixin Zhu Sent: Wednesday, 19 November 2008 8:26 AM To: General MEMS discussion Subject: [mems-talk] AZ50XT single coat Dear all, I am trying to have 60um thick AZ 50XT on top of quartz substrate, and having some issues with the pattern undercut and film stress, is there anyone who can provide a working recipe since the protocol from the vendor seems not working well. Appreciate the help Michael