durusmail: mems-talk: Re: Deposition at below zero
Re: Deposition at below zero
1998-09-22
1998-10-10
Re: Deposition at below zero
Paul McGrath
1998-09-22
Prof. Sadoway at MIT does low temp. stuff he might be interesterd
617-253-3487 Prof Donald Sadoway
DSADWOAY@MIT.EDU
if not please contact me again
thanks
paul

At 10:59 PM 9/9/98 KST, you wrote:
>
>hello, colleague
>It might be silly question to somebody.
>
>but I think it's impossible.
>
>Is there anybody who try to deposit some film at very low temperature.
>
>In PECVD plasma usually occur a little high temp because mobility of
>   electrons are better as temperature higher.
>
>I think it'll possible ,if there is something to break the eletron orbit
>  from nuclear.
>
>If there is anybody to make a new process , would you join me and
>  make revolution.
>
>with thanks.
>
>
Paul McGrath MIT/MTL 60 Vassar St. Bldg 39-217 Cambridge Ma. 02139
Phone 1-617-253-0837  Fax 1-617-258-8500  beep 1-617-560-0099


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