Evelyn, it would seem to me that the Ti seed layer might be oxidized and therefore the upper metal layers aren't sticking. Is the surface discolored by Ti and the metal above lifting off. Gary -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]On Behalf Of shay kaplan Sent: Friday, January 16, 2009 8:39 AM To: benabe@mail.usf.edu; 'General MEMS discussion' Subject: Re: [mems-talk] Adhesion on Alumina Evelyn How are you preparing the substrate surface before evap? Shay