Thanks for the prompt response. What kind of system are you using for descum and ashing? Evelyn On Sun, Jan 18, 2009 at 8:54 PM, Kagan Topalliwrote: > Dear Evelyn, > > For descum of S1813; 300 W, 300 mT, 30 secs works well. > The lower powers should also work if you increase the duration. You can > also try 150 W, 300 mT, 1 min. > > For ashing of S1813; you may increase the power level to 500 W if possible. > You can increase the pressure to 600 mT. The duration may change according > to the thickness of the photoresist, but 30 minutes will be OK if you apply > 300 W. EVELYN BENABE Graduate Research Assistant RF Microsystems Research Group University of South Florida 4202 East Fowler Avenue Tampa, FL 33620 Office: ENB 412 Office Phone: (813)-974-4851 Email: benabe@mail.usf.edu