durusmail: mems-talk: PLD Vs RF Sputtering Deposition of BST Films
PLD Vs RF Sputtering Deposition of BST Films
2009-03-06
2009-03-07
2009-03-09
PLD Vs RF Sputtering Deposition of BST Films
Evelyn B
2009-03-06
Hi,

I have been doing a little bit of literature research about deposition
of BST-5 films on MgO substrates and have found that most the films are
deposited using Pulsed Laser Deposition (PLD) systems instead of RF
Sputtering.  I was under the understanding that RF sputtering was superior
than PLD because it provides smoother surfaces, better uniformity, higher
breakdown voltage, and lower losses.  Why is PLD then chosen as the
deposition method for MgO substrates?

Evelyn

--
EVELYN BENABE
Graduate Research Assistant
RF Microsystems Research Group
University of South Florida
4202 East Fowler Avenue
Tampa, FL 33620
Office: ENB 412
Office Phone: (813)-974-4851
Email: benabe@mail.usf.edu
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