I wouldn't count on Pd to adhere to SiO2.

Some alternative options for adhesion layers are V, Nb,  or Ta.

    --Kirt Williams

----- Original Message -----
From: "Taekyung Kim" 
To: 
Sent: Wednesday, March 18, 2009 9:20 AM
Subject: [mems-talk] Pd as an adhesion layer?


> Hello folks,
>
> I am looking for an adhesion layer between SiO2 and Pt.
> Since my process restriction, I can't use Ti, Cr, and Al.
> Is Pd a fairly good adhesion material for Pt-SiO2?
>
> Thanks
>
> TK