durusmail: mems-talk: Circular grooves in {100}-Si
Circular grooves in {100}-Si
2009-04-19
2009-04-19
2009-04-20
2009-04-20
2009-04-20
2009-04-21
Circular grooves in {100}-Si
Kim
2009-04-19
Hi
Is it possible to make circular grooves (about 50 um deep) in {100}-Si by wet
etching.

Any suggestion will be highly appreciated.

Best regards
Kim
reply