I think almost any wafer dicing saw can do what you are asking. Regards, Steven J. Adamson Market Manager, Asymtek First Past President IMAPS iKNOW Microelectronics The first Place to look for Packaging Information www.iknowmicro.org -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Petru Lunca Popa Sent: Tuesday, June 23, 2009 12:53 AM To: General MEMS discussion Subject: [mems-talk] Cutting Silicium pieces Hi everyone I am working with devices built by depositing Au on Si/SiO2 wafers .On a 2cm/2cm piece of Si I am having 4 devices so I need to cut . Does anyone can reccomand me a good and precise cutting machine? I need a precision of half of milimeter (the distance between samples is 1mm). Also I am performing some FIB or Ebeam on those samples so I want to avoid strong vibrations. So Anyone knows a good machine to cut ? Or a method what can help me? Thank you Petru